Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Product
PXIe-5423, 40 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785115-01
Waveform Generator
The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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Product
PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-03
Waveform Generator
The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
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Product
18 Bit / 300 MS/s Arbitrary Waveform Generator
AWG18
Waveform Generator
The AWG18 is an 18 bit Arbitrary Waveform Generator for high-speed / high resolution waveform generation. This module features two dedicated signal paths. A DC to 100 MHz path which is optimized for accurate time domain and frequency domain measurements up to 30 MHz. And a dedicated AC path optimized for signals between 10 MHz to 100 MHz. In combination with the built-in filters it features a typical harmonics level of better than -80 dBc for the whole range.
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Waveform Generator, 20 MHz, 2 Channel
EDU33212A
Waveform Generator
The EDU33212A dual channel function / arbitrary waveform generator provides uncompromising performance for dual channel synchronized test output signals.
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Product
12GHz Dual Channel Signal Generator 19" 1U Rack Module
LS1292R
Signal Generator
The LS1292R, 12GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1292R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1292R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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6GHz Dual Channel Signal Generator 19" 1U Rack Module
LS6082R
Signal Generator
The LS6082R, 6GHz dual channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6082R features two phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6082R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Arbitrary Function Generator 14-bit, 100Msa/s
PXI-5412
Function Generator
The PXI-5412 is a 20MHz arbitrary waveform generator for generating custom arbitrary waveforms and other standard functions such as sine, square, triangle, and ramp. The arbitrary generator generates signals from -6 V to +6 V and uses direct digital synthesis (DDS) to generate precise waveforms.
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Product
6GHz RF Analog Signal Generator Module
LS6081D
Signal Generator
The LS6081D, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS6081D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081D was designed to offer industry leading price to performance ratio, needed from the R&D benches to the production lines.
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3-Channel PXI Function Generator
41-620A-003
Function Generator
The 41-620A is a compact 3-channel function generator provided in a PXI 3U single-slot module and is fully backward compatible with our 41-620-003 module. It is capable of generating sine waves to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. This module can generate arbitrary waveforms loaded into the internal 256k memory, allowing the function generator to emulate many waveform types, including the typical waveforms of automotive and aerospace sensors.
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50MS/s Single-Channel Arbitrary Waveform Generator
WW5061
Waveform Generator
Model WW5061 represents the next generation of products in the field of function, pulse and arbitrary waveform generators. This instrument is superior and far more versatile than any existing equivalent whether it is an analog or digital product. As a waveform source, this model can replace analog generators in almost every application.
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PXIe CW Source, 1 MHz to 3 GHz or 6 GHz
M9380A
Signal Generator
Save floor space with a compact, modular analog signal generator Provides Keysight quality and performance for local oscillator (LO) substitution, interference and component test Minimize need for external amplification with output power of +18 dBm across the frequency range Reduce test time with easy integration into your high-speed automated test system
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2.5GS/s 16Bit 2GS Mem 4CH 8 Markers AWG
P2584D
Waveform Generator
The Proteus P2584D, is a 2.5GS/s, four channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2584D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe-5433, 80 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785117-01
Waveform Generator
The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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Product
UXG X-Series Agile Signal Generator, 10 MHz to 40 GHz
N5193A
Signal Generator
Get closer to reality: simulate increasingly complex signal environments for radar, EW & antenna-test Test sooner & increase confidence in EW systems by generating signal simulations when you need them: the UXG is a scalable threat simulator Use pulse descriptor words (PDWs) to generate long pulse trains & individually control pulse characteristics Accurately simulate multi-threat environments: 180-ns PDW update rate, chirps 10 to 25% of carrier frequency, pulses as narrow as 10 ns
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PXIe-5413, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
784181-01
Waveform Generator
PXIe, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator - The PXIe-5413 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5413 also features advanced synchronization.
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125MS/s PCIBus Arbitrary Waveform Generator
5300
Waveform Generator
Model 5300 is a Single-Channel Arbitrary Waveform / Function Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5300 and for generating, editing and downloading waveforms from a remote computer.
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Product
40GHz Four Channel MW Signal Generator 19" 1U Rack
LSX4094R
Signal Generator
The Lucid-X is a small footprint modular microwave signal generator that is available in multiple form factors, including Desktop, PXIe module, benchtop, rackmount, and portable. It has been designed to provide low phase noise, with a frequency range all the way up to 40GHz.
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PXIe Multi-Channel Function Generator Module, 8-Channel
43-625-004
Function Generator
The 41-625-004 (PXI) and 43-625-004 (PXIe) are function generator modules that provide 8 channels in a single PXI/PXIe slot. They can generate sine waves to 300 kHz with 5.76 mHz frequency resolution referenced to the 10 MHz PXI clock. The output voltage range is up to +/-25 V in a 16-bit resolution. It also support PXI trigger functions allowing events from other instruments to initiate waveform generation or sweeps.
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Waveform Generator, 20 MHz, 1-Channel, with Arb
33511B
Waveform Generator
Keysight 33500B Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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PXIe-5451, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator
781204-02
Waveform Generator
PXIe, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
