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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Manual Semiconductor Metrology System
Front USB port enables easy storage of measurements and other data to flash drivesMTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and DependabilityNon-contact measurements76-300 mm diameter wafer rangeOptional wafer measurement ringsWafer stops for exact centeringEthernet interfaceFull remote control software (Windows compatible)Optional calibration wafers
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Thin Film Metrology Systems
Gemini Series
The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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Universal 3D Measurement Software
Metrolog
Get a real performance accelerator for your 3D measuring devices and more.Not only does Metrolog X4 architecture benefit from current computer and OS technologies significantly increasing the performances and metrology software throughput, but it also simplifies your day-to-day measurement workflow.
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Semiconductor Metrology Systems
MTI Instruments'' semiconductor wafer metrology tools consist of a complete line of wafer measurement systems for virtually any material including Silicon wafer (Si), Gallium Arsenide wafer (GaAs), Germanium wafer (Ge) and Indium Phosphide wafer (InP). From manual to semi-automated wafer inspection systems, the Proforma line of wafer metrology inspection tools is ideal for wafer thickness, wafer bow, wafer warp, resistivity, site and global flatness measurement. Our proprietary push/pull capacitance probes provide outstanding accuracy throughout their large measurement range, allowing measurement of highly warped wafers and stacked wafers. MTII''s solar metrology tools include off line manual systems for wafer thickness and Total Thickness Variation (TTV), as well as, in-process measurement systems capable of measuring wafer thickness, TTV and wafer bow at the speed of 5 wafers/second.
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PHOTO-2000m M-LUX Meter
Hangzhou Everfine Photo-E-Info Co., LTD
Designed for low illuminance testing above 10-4 lx. The standard CLASS A photometric detector with pre-amplification is adopted, which greatly improves the output signal quality of the detector. At the same time, the industry's advanced level of m-lux detection technology, better stability, suitable for darkroom, photo photocopying room, metering laboratory, physics laboratory, metrology laboratory and other related scientific research, engineering, product inspection and other occasions.
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Gear Metrology System
The Gear Metrology System is a non-contact gear inspection system that generates a 3D point cloud, providing manufacturers with real-time metrology and inspection data to optimize production processes, and improve ROI.
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High Precision Angular Positioning, Calibration and Geometry INspection
LabStandard AIR
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The LabStandardAIR has been designed as a “Contact Free” system and eliminates features, which may detract from achieving the optimum rotational performance. The rotating elements are supported on super high precision, air lubricated, hydrostaticbearings and are not subject to disturbances associated with gear drives.
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Lens Test Equipment
ZEISS lenses for technical applications are key components in complex production processes (Machine Vision) as well as in optical metrology, medical applications, traffic enforcement, quality assurance, sports and many other applications. Here they prove their outstanding image performance and reliability. Due to the precise manual adjustment of the helical focusing mount our partners will gain much better results than with comparable lenses.
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Analytical Software for Microscopy
SPIP
SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enhancing data, analyzing measurements, visualizing and reporting analysis results. The software is used for research and innovation in a variety of industries such as pharmaceutical, cosmetics, semiconductors, hard disk manufacturing, polymer and aluminum manufacturing. Furthermore, SPIP is widely recognized as the standard microscope image analysis software for research and education at leading universities, and has been cited in more than 1200 scientific publications.
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PANELMAP
PANELMAP is a software package used to collect, edit, analyze and visualize measured physical parameters on rectangular semiconductor panels. PANELMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.
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Micro-spot DUV Reflection and Transmission Spectrophotometry
FilmTek 3000 PAR
Scientific Computing International
Metrology system with a 50µm spot that delivers high-performance transmission and reflection measurement of patterned films deposited on transparent substrates. Ideally suited for measuring the thickness and optical constants of very thin absorbing films.
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PHOTO-2000μ Μ-LUX Meter
Hangzhou Everfine Photo-E-Info Co., LTD
The PHOTO-2000μ is designed for low illuminance testing above 10-6lx. Using the international leading low-lux detection technology, the measurement accuracy is high, good stability, often used in metering laboratory, physics laboratory, metrology laboratory and other related scientific research, engineering, product inspection and other occasions.
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MEMS And Sensor Test Automation Platform
Sense+
Sense+™ ultra-precise MEMS & sensor test automation platform allows for significant improvement in test accuracy, parallelism for a lower cost of test, and the ability to handle and inspect, small delicate sensors. Fully configured, Sense+ delivers a one-pass automated test, inspection, and metrology for the most complex MEMS devices including <1 mm WLCSP.
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Stand alone Software
MeX
MeX is a stand alone software package that turns any SEM with digital imaging into a true surface metrology device. Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset which is then used to perform traceable metrology examination. The results are obtained irrespective of the SEM magnification providing metrology at macro and micro levels. No additional hardware is necessary to run MeX and it can be used with any SEM. Due to the unique AutoCalibration routine the calibration data is automatically refined. Thereby only MeX enables traceable 3D measurements at any magnification in the SEM.
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Digital Readouts & Metrology Tools
HEIDENHAIN digital readouts have universal applications. In addition to standard tasks on milling, drilling and boring machines and lathes, they also can be used with machine tools, measuring and testing equipment, and special machines in fact, they can be used with any machine where axis slides are traversed manually.
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Wafer Inspection Products
Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
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Add-ons For Metrology
We offer add-on products for Optical Frequency Combs and metrology applications. These include heterodyne photodetectors (BDU), and highly stable RF oscillators, just to name a few.
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Production Camera Test System
Meridian
Designed for rapid customization, the Meridian product line offers a revolutionary hardware and software approach to production camera testing. It's a flexible test tool kit that's compact, cost-effective and easy to incorporate in your production line: the graphical user interface facilitates setup and selection of metrology parameters; and a library of functions integrates easily into your testing software.
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Software
LK Metrology offers the ultimate choice of CMM multi-sensor metrology softwares. The CAMIO software fits all solutions, especially those high-end industries, such as the aerospace industry, point cloud measurements and for offline solutions while the ARCOCAD software suits standard application, manual CMMs and portable measuring arms.
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kSA ACE
The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Static and dynamic analysis
MEMS
Static and dynamic analysis and visualization are critical parts of the test and development process for MEMS microstructures in order to characterize surface metrology and measure in and out of plane motions. The PS4L Adaptive Architecture is ideal for configuring a system to perform tests to very specialized requirements of the MEMS customer. MEMS customers often require vacuum probing, which is available in semiautomatic and fully automatic configurations.
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Metrology Solutions for Semiconductors
Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition.
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High Precision Angular Position, Calibration and Geometry Inspection
GeoOrdinate
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The GeoOrdinate has been designed specifically for the inspection of large and heavy components and is fully compatible with any shop floor environment whilst maintaining world class accuracies more commonly seen in the standards laboratory.
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Sphygmomanometer Calibrator
Huaxin instrument (Beijing) Co., Ltd
Here at Huaxin, as an expert test equipment solution provider, we are proud to offer a selection of pressure calibrators for precise calibration of sphygmomanometer in laboratory and on site. Our sphygmomanometer calibrators find wide applications in metrology bodies, hospitals, university labs, etc.
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SF6 Electrical Equipment Gas Comprehensive Detector
JH4000D-4
Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000 series SF6 Electrical Equipment Gas Comprehensive Detector is a high precision, intelligent and portable comprehensive detector. It detects the main decomposition products, as well as SF6 purity and moisture content. It is reliable, accurate and stable. The user is able to make rapid and accurate judgment based on the content of main decomposition products, SF6 purity and moisture content. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. This comprehensive detector is designed flexibly for the user’s choice. They can combine any two or three detection together. They can work simultaneously or separately, providing more complete measures for the inner fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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CEP Stable Lasers And CEP Phase Stabilization
Carrier envelope phase stabilization (CEP) is an enabling technology for metrology and for the generation of few cycle pulses. As one of the pioneers in the field we have developed products that allow to stabilize the carrier envelope phase of light pulses of few cycle pulse oscillators and amplifiers.
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Precision Connectors
Rosenberger Hochfrequenztechnik GmbH & Co. KG
Connectors form the electronic bridge for active and passive components and devices in a variety of applications. In the laboratory and metrology sector – for example in research and development, testing or quality assurance departments – precision connectors are used due to the detailed requirements for technology and processes.
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Microelectronics And Packaging AOI
Machine Vision Products, Inc. has extensive experience in a wide range of Microelectronics and Packaging applications. MVP works with the world’s leading manufacturers on a global basis. From multiple die and wire technologies to leadframe, ball grid array and surface inspection applications, MVP has the widest applications toolbox of any AOI provider. MVP takes pride in the fact that they supply many complex inspection solutions to diverse industries such as Automotive, Telecoms, Medical Devices, Military, and Space. MVP’s 900 Series is the base platform upon which all Microelectronics and Packaging inspection solutions are based. The 900 series 2D capabilities provide metrology and defect detection using a propriety Quad-Color lighting, Telecentric optics and resolutions down to 1um. 3D height measurement capabilities allow for in-line high speed inspection of Dies, paste deposition, positional accuracy, volume and height with a resolution down to 1.13um.
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Quantum & Metrology Instruments
Beyond quantum sensors, Exail’s photonics solutions enable real applications in other quantum technology fields. They also enable precise control and transmission of the frequency, phase and amplitude of a laser light through fibered telecommunication links, for metrology applications. The true and deep understanding of Exail teams for the fundamental physics behind its technology explains the absolute quality of its time & frequency reference products.
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Scatterometers / Thin film Metrology Systems
Olympian Series
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
