Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Product
Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Product
250MS/s PXIBus Arbitrary Waveform Generator
5251
Waveform Generator
Model 5251, is a single-channel frequency agile waveform synthesizer that combines industry leading performance, frequency agility and modulation capability in a stand-alone, modular product. Having 1.5Hz to 250MHz clock and 16-bit vertical DAC resolution provides the test stimuli required for the decades to come. It can be used as an arbitrary waveform generator, modulating generator, as well as function and pulse generator.
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Product
3GHz Single Channel Signal Generator 19" 1U Rack Module
LS3081R
Signal Generator
The LS3081R, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS3081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
Waveform Generator, 30 MHz, 1-Channel with Arb
33521B
Waveform Generator
Keysight 33500B Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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Dual Channel 100 MHz Pulse Generator
PXIe-1209
Pulse Generator
The Astronics Test Systems PXIe-1209 PXI is a high-performance, 2-channel, 100 MHz Pulse Generator. Occupying a single PXI Express peripheral slot or hybrid slot, the PXIe-1209 provides dual independent pulse generation with fullcontrol of all timing parameters with extremely high resolution.
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PXI-5406, 14/16-Bit, 20/40 MHz Arbitrary Function Generator
779657-01
Waveform Generator
40 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5406 is a 40 MHz function generator capable of generating standard functions including sine, square, triangle, and ramp as well as other signals like psuedorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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9GS/s 16Bit 8GS Mem 8CH 16 Markers RF AWG Benchtop
P9488B
Waveform Generator
The benchtop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, 19” benchtop box. With a 9” touch display and on-board PC the benchtop platform enables users to program the instrument without the need of an external PC. Users can program the instrument from the onboard PC using various programming environments such as MATLAB, LabView, Python, and more. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, high performance, and cost effective solution.
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3GHz RF Analog Signal Generator Module
LS3081D
Signal Generator
The LS3081D, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS3081D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081D was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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2.5GS/s 16Bit 2GS Mem 4CH Arbitrary Waveform Generators
P2584B
Waveform Generator
The Proteus P2584B, is a 2.5GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2584B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
Waveform Generator, 20 MHz, 2-Channel
33510B
Waveform Generator
The 33510B waveform generator provides Keysight’s exclusive Trueform technology which offers unmatched capabilities for generating a full range of signals for your most demanding measurements.
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40GHz Single Channel MW Signal Generator 19" 1U Rack
LSX4091R
Signal Generator
The LSX4091R is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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50MS/s Four-Channel Arbitrary Waveform Generator
WW5064
Waveform Generator
The WW5064 offer a 50 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 25MHz.
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Product
PCI-5402, 20 MHz Bandwidth, 14-Bit Waveform Generator Device
779656-01
Waveform Generator
The PCI‑5402 can generate standard functions, including sine, square, triangle, and ramp as well as other signals like pseudorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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12GHz Single Channel Signal Generator 19" 1U Rack Module
LS1291R
Signal Generator
The LS1291R, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1291R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-02
Waveform Generator
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
2.5GS/s 16Bit 2GS Mem 12CH Arbitrary Waveform Generators
P25812B
Waveform Generator
The Proteus P25812B, is a 2.5GS/s, twelve channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P25812B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
6GHz Four Channel Signal Generator 19" 1U Rack Module
LS6084R
Signal Generator
The LS6084R, 6GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
Signal Generator
The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
AT-1120, 14-Bit, 2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-01
Signal Generator
The AT-1120 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs. The AT-1120 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1120, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082B
Waveform Generator
The Proteus P9082B, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
Waveform Generator, 80 MHz, 2-Channel
33612A
Waveform Generator
With Trueform Series Waveform and Function Generators, you can define any waveform shape and any waveform length using point-by-point arbitrary waveform capability. Anti-aliasing technology ensures your waveforms are exceptionally accurate, and playable at any rate you select. Play signals as defined, at the exact sample rate, without missing short-duration anomalies critical for testing device reliability.
