Plasma Generators
-
Product
RF Plasma Generators
-
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
-
Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
-
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
-
Product
Elite™ 13.56 MHz RF Plasma Generators
-
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
-
Product
KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
-
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
-
Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
-
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
-
Product
Remote Plasma Sources
-
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
-
Product
High Power Microwave Plasma System
-
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
-
Product
In Situ Diagnostics
-
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
-
Product
Plasma Power Generators
-
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
-
Product
Low Frequency RF Broadband Power Sources
-
Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
-
Product
16 Bit Waveform Generator
PA72G16400
Waveform Generator
The PA72G16400 is a 16-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 400Msps. The high resolution and the high sample rate allows generating signals with very low quantization noise levels. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 8MWord of memory, there is lots of room for uploading several different patterns, allowing switching patterns with minimal bus communication.
-
Product
MXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5183B
Signal Generator
Get a fast, compact (2U) alternative to the PSG in the lab, depot or fieldAddress demanding tests of radar modules & systems with near-PSG levels of spectral purityCompensate for system loss & drive high-power amplifiers: +19 dBm output power, -55 dBc harmonics & -68 dBc spurious @ 20 GHzReduce calibration time with switching speed 600 sSimulate narrowband chirps & radar antenna scans with up to five internal function generators that can be used with AM, FM, OM pulse modulation
-
Product
PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-01
Waveform Generator
The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
-
Product
6GHz RF Analog Signal Generator Module
LS6081D
Signal Generator
The LS6081D, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS6081D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081D was designed to offer industry leading price to performance ratio, needed from the R&D benches to the production lines.
-
Product
Waveform Generator, 20 MHz, 2 Channel
EDU33212A
Waveform Generator
The EDU33212A dual channel function / arbitrary waveform generator provides uncompromising performance for dual channel synchronized test output signals.
-
Product
PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 32 MB, PXI Waveform Generator
780109-01
Waveform Generator
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 32 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
-
Product
VXI Waveform Generators
Waveform Generator
Astronics Test Systems offers VXI Arbitrary Waveform Generators with a long, reliable heritage for military use.
-
Product
3GHz Dual Channel Signal Generator
LS3082B
Signal Generator
The LS3082B is a 3GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
Product
Dual/Quad 125 MS/s VXI Arbitrary Waveform Generator
3164
Waveform Generator
The Racal Instruments™ 3164 Series is a single-wide VXIbus Module. The 3164-2 has two 14-bit Arbitrary Waveform Generator (AWG) channels that operate independently, and the 3164-4 AWG has four channels. The maximumsample rate for each channel is 125 MS/s. All waveforms can be sampled from data previously loaded into waveform memory or loaded and output on the fly.
-
Product
PXIe-5451, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator
781204-02
Waveform Generator
PXIe, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
-
Product
50MS/s PXIBus Arbitrary Waveform Generator
5200
Waveform Generator
Model 5200 is a Single-Channel Arbitrary Waveform Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5200 and for generating, editing and downloading waveforms from a remote computer.
-
Product
Waveform Generators
Waveform Generator
Waveform Generators produce large, complex analog waveforms in a sequential manner or using real-time streaming. These instruments are ideal for applications in scientific research and testing of consumer electronics, automotive, and aerospace/defense.
-
Product
PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-04
Waveform Generator
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
-
Product
50MS/s Dual-Channel Arbitrary Waveform Generator
WW5062
Waveform Generator
Model WW5062 represents the next generation of products in the field of function, pulse and arbitrary waveform generators. This instrument is superior and far more versatile than any existing equivalent whether it is an analog or digital product. As a waveform source, this model can replace analog generators in almost every application.
-
Product
20GHz Single Channel MW Signal Generator 19" 1U Rack
LSX2091R
Signal Generator
The LSX2091R is a 20GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
Product
12GHz Single Channel Portable Signal Generator
LS1291P
Signal Generator
The LS1291P, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS1291P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
-
Product
PXI/PXIe Arbitrary Generators
Waveform Generator
The arbitrary waveform generators of the PXA72xx family are characterized by a resolution of 16 bits with a maximum sample rate of 200 MS per second. The devices can also be used to directly output voltages of up to 30 V (or ±15 V).
-
Product
3GHz Single Channel Signal Generator 19" 1U Rack Module
LS3081R
Signal Generator
The LS3081R, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS3081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
Product
2.5GS/s 16Bit 2GS Mem 12CH 24 Markers AWG
P25812D
Waveform Generator
The Proteus P25812D, is a 2.5GS/s, twelve channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P25812D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
-
Product
3-Channel PXI Function Generator
41-620A-003
Function Generator
The 41-620A is a compact 3-channel function generator provided in a PXI 3U single-slot module and is fully backward compatible with our 41-620-003 module. It is capable of generating sine waves to 10MHz with 48-bit frequency resolution referenced to the 10MHz PXI clock or to an external standard. This module can generate arbitrary waveforms loaded into the internal 256k memory, allowing the function generator to emulate many waveform types, including the typical waveforms of automotive and aerospace sensors.
