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Plasma Generators
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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9GS/s 8 Bit, 4GS Mem 6CH 24 Markers AWG
P9086B
The Proteus P9086B, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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125MS/s PCIBus Arbitrary Waveform Generator
5300
Model 5300 is a Single-Channel Arbitrary Waveform / Function Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5300 and for generating, editing and downloading waveforms from a remote computer.
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3GHz RF Analog Signal Generator Module
LS3081D
The LS3081D, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS3081D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081D was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Four Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284M
The Proteus P1284M, is a PXIe based, 1.25GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P1284M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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200 MS/s Waveform Generator & Dual 50 MHz Pulse/ Timing Generator
3172
The Racal Instruments™ 3172, a 200 MS/s Waveform Generator and Dual 50 MHz Pulse and Timing Generator, combines multi-instrument density and highfrequency performance in a single-slot, C-sized VXIbus format.Waveform output in the range of 100 μHz to 30 MHz with 16-bit vertical resolution (12-bit vertical for 3171 emulation) and pulse output to 50 MHz make the 3172 a powerful solution to a variety of test stimulus requirements.
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2.5GS/s 16Bit 2GS Mem 4CH 8 Markers AWG
P2584D
The Proteus P2584D, is a 2.5GS/s, four channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2584D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe-5423, 40 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785115-01
PXIe, 40 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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Dual Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282M
The Proteus P1282M, is a PXIe based, 1.25GS/s, dual channel arbitrary waveform generator. The P1282M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Analog Output/Arbitrary Waveform Generator PXI Card
GX1649 Series
The GX1649 is a 3U PXI digital to analog output board designed specifically for applications where multiple DC or AC analog outputs are required. The GX1649 offers 64 output channels with 16-bits of precision signal sourcing performance and can be used as a DC source or arbitrary waveform generator.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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PXIe-5433, 80 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785118-01
PXIe, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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Arbitrary Waveform Generator
VX2026
The VX2026 is a high speed (40MS/s), 14Bit, Arbitrary Waveform Generator for high performance testing. Built-in functions for pre-defined waveforms (sine, square, triangle, sawtooth) are available via software driver. Arbitrary waveforms will be loaded via data files into the on-board memory.
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Four Channel Arbitrary Waveform Generator 2.5GS/s 16Bit 1GS Mem 4CH 8 Markers AWG
P2584M
The Proteus P2584M, is a PXIe based, 2.5GS/s, four channel arbitrary waveform generator offering technologically advanced options and configurations such as, a dual channel 2.7GS/s digitizer with 9GHz bandwidth, to transform the instrument to an arbitrary waveform transceiver. The P2584M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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VXI Quad Sine Cosine Generator
VX2701
Low distortion sine and cosine generationFrequency bandwidth up to 100kHzProgrammable phase ± 180 ° (0.1 ° resolution)Precise sine zero crossing trigger output with selectable delayProgrammable DC offset ± 10VProgrammable output voltage ± 10V p
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Dual Channel 100 MHz Pulse Generator
PXIe-1209
The Astronics Test Systems PXIe-1209 PXI is a high-performance, 2-channel, 100 MHz Pulse Generator. Occupying a single PXI Express peripheral slot or hybrid slot, the PXIe-1209 provides dual independent pulse generation with fullcontrol of all timing parameters with extremely high resolution.
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9GS/s 8Bit, 4GS Mem 6CH 24 Markers AWG
P9086D
The Proteus P9086D, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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6GHz Dual Channel Signal Generator 19" 1U Rack Module
LS6082R
The LS6082R, 6GHz dual channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS6082R features two phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6082R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI RF Analog Signal Generator
PXI RF Analog Signal Generators deliver the functionality of RF signal generators to the modular, compact PXI form factor. These modules support frequency ranges from 250 kHz to 20 GHz. You can combine PXI RF Analog Signal Generators with other PXI modular instrumentation to design automated test systems for radar, RF integrated circuits (RFICs), and automotive test applications.
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PXIe-5450, 145 MHz Bandwidth, 16-Bit, 512 MB, I/Q PXI Waveform Generator
780419-02
PXIe, 145 MHz Bandwidth, 16-Bit, 512 MB, I/Q PXI Waveform Generator—The PXIe‑5450 is a 145 MHz, dual‐channel arbitrary waveform generator optimized for I/Q communications signals. It is an ideal instrument for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator. The PXIe‑5450 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5450 also features advanced synchronization and data streaming capabilities.
