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Plasma Generators
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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100MS/s Four-Channel Arbitrary Waveform Generator
WW1074
The WW1074 offer a 100 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 50MHz.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-04
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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3GHz 16-Channel Signal Generator 19" 3U Rack Module
LS30816R
The LS30816R, 3GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS30816R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS30816R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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100MS/s Dual-Channel Arbitrary Waveform Generator
WW1072
The WW1072 represents a new dimension in arbitrary waveform generator design. With an unprecedented combination of arbitrary generator and synthesizer, versatility, high resolution and wide frequency range, and outstanding performance-to-price ratio, the WW1071 delivers diverse benefits that will facilitate tasks in many fields.
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200 MS/s Waveform Generator & Dual 50 MHz Pulse/ Timing Generator
3172
The Racal Instruments™ 3172, a 200 MS/s Waveform Generator and Dual 50 MHz Pulse and Timing Generator, combines multi-instrument density and highfrequency performance in a single-slot, C-sized VXIbus format.Waveform output in the range of 100 μHz to 30 MHz with 16-bit vertical resolution (12-bit vertical for 3171 emulation) and pulse output to 50 MHz make the 3172 a powerful solution to a variety of test stimulus requirements.
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Dual Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282M
The Proteus P1282M, is a PXIe based, 1.25GS/s, dual channel arbitrary waveform generator. The P1282M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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250MS/s PCIBus Arbitrary Waveform Generator
5351
Model 5351, is a single-channel frequency agile waveform synthesizer that combines industry leading performance, frequency agility and modulation capability in a stand-alone, modular product. Having 1.5Hz to 250MHz clock and 16-bit vertical DAC resolution provides the test stimuli required for the decades to come. It can be used as an arbitrary waveform generator, modulating generator, as well as function and pulse generator.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282D
The Proteus P1282D, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit and perform digital signal processing all in a single instrument. The P1282D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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6GHz Single Channel Signal Generator 19" 1U Rack Module
LS6081R
The LS6081R, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS6081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Waveform Generators
Waveform Generators produce large, complex analog waveforms in a sequential manner or using real-time streaming. These instruments are ideal for applications in scientific research and testing of consumer electronics, automotive, and aerospace/defense.
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PXIe3.0-based 2.5GS/s Arbitrary Waveform Generator
P2500M
The P2500M series is a PXIe3.0-based 2.5GS/s arbitrary waveform generator module that provides technologically advanced options and configurations, such as dual-channel 5.4GS/s ADC signal acquisition channels with 9GHz bandwidth, which can convert the instrument to arbitrary waveform transceivers device. The P2500M offers industry-leading performance including innovative task-oriented programming, real-time data streaming, fast feedback loops for environment-based waveform generation, and user-definable FPGAs for application-specific solutions.
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6GHz Single Channel Portable Signal Generator
LS6081P
The LS6081P, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS6081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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2.5GS/s 16Bit 2GS Mem 12CH 24 Markers AWG
P25812D
The Proteus P25812D, is a 2.5GS/s, twelve channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P25812D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Dual Channel 100 MHz Pulse Generator
PXIe-1209
The Astronics Test Systems PXIe-1209 PXI is a high-performance, 2-channel, 100 MHz Pulse Generator. Occupying a single PXI Express peripheral slot or hybrid slot, the PXIe-1209 provides dual independent pulse generation with fullcontrol of all timing parameters with extremely high resolution.
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Analog Output/Arbitrary Waveform Generator PXI Card
GX1649 Series
The GX1649 is a 3U PXI digital to analog output board designed specifically for applications where multiple DC or AC analog outputs are required. The GX1649 offers 64 output channels with 16-bits of precision signal sourcing performance and can be used as a DC source or arbitrary waveform generator.
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9GS/s 8 Bit, 4GS Mem 6CH 24 Markers AWG
P9086B
The Proteus P9086B, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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1.25GS/s 16Bit 1GS Mem 4CH 4 Markers AWG
P1284D
The Proteus P1284D, is a 1.25GS/s, four channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1284D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5402, 14/16-Bit, 20/40 MHz Arbitrary Function Generator
779655-01
20 MHz Bandwidth, 14-Bit PXI Waveform Generator—The PXI‑5402 is a 20 MHz function generator capable of generating standard functions including sine, square, triangle, and ramp as well as other signals like psuedorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Astronics PXIe-1209 , 2-Channel, 100 MHz PXI Pulse Generator
785033-01
2-Channel, 100 MHz PXI Pulse Generator - The Astronics PXIe-1209 provides dual independent pulse generation with full control of all timing parameters with extremely high resolution. Both channels are fully independent, and you can configure pulse delay, double pulse spacing, pulse width, and period. Each channel offers front panel trigger inputs with software-programmable thresholds and PXI backplane triggering.
