MKS Instruments
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.
- 978-645-5500
- 2 Tech Drive
Suite 201
Andover, MA 01810
United States of America
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Residual Gas Analyzers
Residual Gas Analyzers are an effective tool to analyze system gas loads resulting from real leaks, virtual leaks or chamber wall outgassing. RGAs have a number of advantages over traditional, dedicated gas leak detectors including the ability to differentiate between different gas species, comparable sensitivity levels, the ability to detect internal or "virtual" leaks and to detect and analyze outgassing problems.
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AD06A Baratron® Differential Pressure Sensor
AD06A Baratron® differential pressure sensors are single-ended dual-electrode/AC bridge devices that are extremely stable and designed to minimize the effect of temperature changes. Full Scale ranges are available from 25,000 Torr down to 0.1 Torr. Each range measures down to 1 part in 106 Full Scale with selected percent Reading accuracy limited by this resolution and with accuracies ranging from 0.25% to 0.05% of Reading. They are constructed of Inconel® and stainless steel, allowing use with many wet, dirty, or corrosive gases.
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High Temperature Absolute Pressure Transducers
Our high temperature Baratron® capacitance manometers are controlled to temperatures of 150°C or higher for use use in demanding semiconductor manufacturing vacuum processes such as metal etching and nitride film chemical vapor deposition (CVD).
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915 MHz Industrial Microwave Generators
Alter® GS Series industrial microwave generators provide 15kW to 75kW power at 915 MHz in a shielded cabinet with continuous powerline control, safety interlocks, a variety of interface options and optional remote control. The GS series design include Alter®'s proven switch mode power supply systems with continuous power control for rugged, light weight and modular microwave generator systems. This solution allows for power upgrades for industrial installation needs, offering maximum flexibility in system design.
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General Performance Absolute Pressure Switches
These absolute vacuum / pressure switches offer fast, accurate, and reliable protection for vacuum equipment and processes. Designed for applications where a DC signal output is not required, these pressure switches provide relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Atmospheric Pressure Gas Analyzers
The Cirrus™ single-quadrupole mass spectrometers are powerful analytical tools for a wide range of laboratory and industry-based gas analysis applications. The Cirrus family, featuring the Cirrus™ 3 and Cirrus™ 3-XD atmospheric pressure gas monitoring systems are ideal for analysis of bulk gas, gas composition, and detection of trace gasses and contamination. These powerful, versatile and customizable platforms, when combined with Process Eye™ Professional software and its recipe-based control, can significantly boost your productivity.
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Process Automation Controllers
As innovators in programmable control, communication protocols, embedded analytics, and gateway technology, MKS has the critical building blocks and experience to deliver the latest technologies for distributed automation control and process monitoring to our customers, personalized for their exact requirements.
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Industrial Differential Pressure Transducers
These industrial Baratron® capacitance manometers feature differential pressure measurement, industrial enclosures, and higher operating temperature ranges for industrial applications.
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RF Power Generators
MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
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DELTA™ IV 4-zone Flow Ratio Controller
DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.
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Compact Ultrafast 50-50,000 sccm Mass Flow Controller/Meter
C-Series
The C-Series Mass Flow Controller (MFC) is a compact, fast-response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. It is available in Full Scale flow rates from 50 sccm to 50 slm (N2 equivalent) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Analog (0 to 5 VDC) or digital (RS485 or Modbus TCP/IP) communications interfaces are available. Required power supply voltage is 24 VDC nominal.
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High Performance Baratron® Absolute Pressure Transducers
These high performance Baratron® capacitance manometers operate at ambient temperature. They are referenced to vacuum for gas independent, direct measurement of absolute pressure.
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High Accuracy In-Situ Mass Flow Verifier
HA-MFV
The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.
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Newport Corporation
Newport is a brand within the MKS Instruments Light & Motion division. The Newport product portfolio consists of a full range of solutions including motion control, optical tables and vibration isolation systems, photonic instruments, optics and opto-mechanical components. Newport’s innovative solutions leverage core expertise in vibration isolation and sub-micron positioning systems, opto-mechanical and photonics subsystems, to enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, and research and defense markets.
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Electro Scientific Industries, Inc.
Leveraging its innovative technical competencies, ESI's portfolio of micro-engineering solutions enhances manufacturing processes around the globe
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Newport Electronics
Newport Corporation, a wholly owned subsidiary of MKS Instruments, Inc. (NASDAQ: MKSI ), is a leading global supplier of advanced technology products and systems to customers in the scientific research, microelectronics, life and health sciences, industrial manufacturing and defense/security markets. Established in 1969, Newport has over 52 years of industry knowledge and expertise across a broad range of technologies allowing the company to continually deliver innovative products in the areas of lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, and optical components and subsystems to enhance the capabilities and productivity of its customers' manufacturing, engineering and research applications. In addition, Newport has built a strong history of partnering with OEM customers, delivering solutions from subassemblies to full solutions including design, testing and manufacturing.
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Ophir
Ophir is a brand within the MKS Instruments Light & Motion division. The Ophir product portfolio consists of laser and LED measurement products, including laser power and energy meters and laser beam profilers
