Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Product
Metrology System
Echo
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The Echo system is a comprehensive in-line metal film metrology tool for single and multi-layer metal film measurements in leading-edge logic, memory, advanced packaging, and specialty semiconductor devices.
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Product
Benchtop Metrology System
FilmTek 2000 SE
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Scientific Computing International
Benchtop metrology system delivering unmatched measurement performance, versatility, and speed for unpatterned thin to thick film applications. Ideally suited for academic and R&D settings. Combines spectroscopic rotating compensator ellipsometry, multi-angle polarized spectroscopic reflection, and intuitive material modeling software to make even the most demanding of measurement tasks simple and reliable.
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Product
Materials Metrology
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Nova is a market leader for innovative thin film metrology and process control technologies. We develop highly sensitive in-line metrology solutions on high productivity platforms, thereby enabling critical metrology solutions to be closer to a semiconductor fab’s process and integration needs.Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
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Product
Thermal Warpage Metrology Tool
AXP 2.0
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The TherMoiré® AXP 2.0 is a modular metrology solution that utilizes the shadow moiré measurement technique, combined with automated phase-stepping, to characterize out-of-plane displacement for samples up to 400 mm x 400 mm. With time-temperature profiling capability, the TherMoiré® AXP 2.0 captures a complete history of a sample’s behavior during a user-defined thermal profile.
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Product
Warpage Metrology System
TableTop Shadow Moiré (TTSM)
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Measure warpage of substrates up to 300mm x 310 mm (a 300mm wafer or two JEDEC trays) with the entire measurement taking less than two seconds. Whether individual parts or a JEDEC tray of multiple parts, the TTSM provides an ultra-fast and highly accurate measurement at room temperature that is suited for tabletop use.
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Product
Metrology
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SV TCL also has the capability to emulate the testing environment with our probe card analyzers including newly installed direct dock analyzers in the United States, Taiwan and Vietnam. SV TCL is dedicated to continuous product improvement so that we can provide our customers the latest and most innovative test solutions.
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Product
High-Speed & High-Precision Alignment for Display Metrology
LMK Position
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TechnoTeam Bildverarbeitung GmbH
The LMK Position is a photometric robotic system combining LMK-based machine vision with the high precision and flexible movements of a 6-axis Denso VS industrial robot and, optionally, a JETI specbos spectroradiometer. It allows effective and cost-efficient accompanying measurements during research and development tasks and rapid small-series product testing of all kinds of display systems.
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Product
Metrology System
IVS
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The IVS 220 system is the latest generation in the IVS series and has been designed for ultimate precision, TIS (tool induced shift) and throughput on 200mm wafers. The cornerstone of the system’s reliability and stability is its mean time between failure (MTBF) of 2,100 hours. The IVS 280 provides the same capability in a package designed for overhead track handling with full E84 GEM300 capability.
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Product
Stationary Test Equipment
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Single- and three-phase, standardized and individual test systems are covering all legal metrological test requirements for simple meters, high precision multifunction meters, smart meters and reference standards. Flexible and modular system components for the optimal customer orientated solution.
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Product
Horizontal Arm CMMs
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As a system provider, ZEISS offers just the solutions for the changing conditions of day-to-day measuring tasks with impressive accuracy, effectiveness, and above all, dependability. From the first consultation on the installation, to the maintenance of your measuring machines, ZEISS takes charge of your metrology. You get all the services and products from the same partner – and all optimally matched to each other.
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Product
Advanced Packaging & TSV
FilmTek 2000M TSV
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Scientific Computing International
Advanced semiconductor packaging metrology system providing an unmatched combination of speed, accuracy, and precision for high-throughput measurements of resist thickness, through silicon vias (TSVs), Cu-pillars, bumps, redistribution layer (RDL) and other packaging processes.
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Product
QE Systems
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Abet Technologies offers a range of standard EQE and IQE measurement systems. Model QE-1100 is configured with the most useful components for single junction devices. It has a 350 – 1100 nm range. The QE-1800 is configured with components most useful for components for triple junction cells. Beyond the standard systems offered systems can be custom configured to meet a customer’s metrology needs.
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Product
Micrometers
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Is a device incorporating a calibrated screw widely used for accurate measurement of components in mechanical engineering and machining as well as most mechanical trades, along with other metrological instruments such as dial, vernier, and digital calipers.
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Product
Ambient Air Quality Monitoring System
AQMS
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AQMS, the doctor for "Human Health"An Air Quality Monitoring Station (AQMS) is a system that measures metrological parameters such as wind speed, wind direction, rainfall, radiation, temperature, barometric pressure and ambient parameters. The AQMS also integrates a series of ambient analyzers to monitor the concentration of air pollutants (such as SO2, NOx, CO, O3, THC, PM, etc.), continuously. HORIBA also provides mobile monitoring stations that can be used to monitor ambient conditions at multiple sites.
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Product
Industrial Calibrators
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A temperature calibrator, often called a thermometer calibrator, is used to correct inaccuracies in installed thermometers and temperature sensors, because temperature measurement is a critical parameter in many industrial processes. Although simulators are sometimes called temperature calibrators or thermometer calibrators and may be used to provide thermometer calibration for the electronics in an installed system, a temperature source with a calibrated reference sensor is still required to provide a complete and meaningful calibration. Fluke Calibration industrial and field temperature calibrators include: Metrology Wells; Field Metrology Wells; field dry-well calibrators; handheld dry block calibrators; Micro-Baths; large target infrared calibrators; field IR calibrators; ice-point dry-well; and thermocouple furnaces.
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Product
In-Line Metrology
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For industrial applications, k-Space is known for its ability to provide robust data and analysis for in-line solutions in production environments. k-Space works side by side with the customer to understand their specific measurement and inspection needs, and then develops a custom solution to meet the identified requirements. Our solution includes custom measurement technology, software, database generation and integration, go/no go determination, pick and place, alarm status, and PLC communication.
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Product
High Precision Angular Positioning, Calibration and Geometry INspection
LabStandard AIR
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Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.The LabStandardAIR has been designed as a “Contact Free” system and eliminates features, which may detract from achieving the optimum rotational performance. The rotating elements are supported on super high precision, air lubricated, hydrostaticbearings and are not subject to disturbances associated with gear drives.
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Product
Thermistor Power Meter
N432A
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Keysight N432A is the replacement for Keysight's legacy 432A analog thermistor power meter. The single-channel, average RF power meter operates with the Keysight 8478B and 478A thermistor mounts. The N432A-and-thermistor-mount pair is ideal for applications that require high measurement accuracy, particularly in metrology and calibration laboratory environments. The enhanced thermistor power meter comes with a digital color LCD display, and user-friendly front panel interface. Its built-in calibration factor table provides a more convenient and accurate method of storing calibration factors as compared to the old knob-turning approach of the 432A. The N432A is LXI compliant, and programmable via GPIB, USB and LAN.
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Product
Optical Filter Sets
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Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Product
Customized Semiconductor Wafer Inspection, Sorting & Metrology Equipment | Systems
Customized Solutions
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Unique Needs? Need better wafer inspection throughput, accuracy, versatility? Need a wafer defect inspection expert who’s not a sales person? We’ve been providing complete semiconductor wafer inspection, sorter, and microscopes solutions to semiconductor wafer manufacturers since 1994.
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Product
Multi-Surface Profiler
Tropel® FlatMaster® MSP
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The Tropel® FlatMaster® MSP (Multi-Surface Profiler) is a frequency stepping interferometer that provides fast and accurate metrology for semiconductor wafers up to 300mm in diameter. In seconds up to 3 million data points are collected with sub-micron accuracy enabling total thickness and flatness characterization over the entire surface.
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Product
Analytical Software for Microscopy
SPIP
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SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enhancing data, analyzing measurements, visualizing and reporting analysis results. The software is used for research and innovation in a variety of industries such as pharmaceutical, cosmetics, semiconductors, hard disk manufacturing, polymer and aluminum manufacturing. Furthermore, SPIP is widely recognized as the standard microscope image analysis software for research and education at leading universities, and has been cited in more than 1200 scientific publications.
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Product
SF6 Decomposition Products Detector
JH4000A-4
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Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000A-4 SF6 Electrical Equipment Decomposition Products Detector is a high precision, intelligent and portable device, able to make judgment rapidly and correctly based on the content of main decomposition products of insulation materials inside the SF6 electrical equipment like SF6 circuit breaker, instrument transformer, GIS and transformer. It detects SO2+SOF2, H2S, CO and HF. It is reliable, accurate and stable. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. Decomposition products detection provides reliable evidence for the internal fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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Product
First Article Inspection Services
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API’s, on-site, first article measurement services provide inspection data on parts and assemblies with direct comparison against CAD models or drawings. Generated 3D measurement data from our portable metrology equipment and 3D scanners offers a comprehensive analysis of the physical part under measurement. Inspection reports can include 3D color maps or generated 3D models for detailed computer analysis.
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Product
Make Your 3D Control Smarter
VALUE ADDED SOLUTIONS
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At Metrologic Group, we always seek to be a problem-solver for industrial manufacturers and quality assurance professionals. That is why, we continuously develop improvements of our software and complementary solutions to respond or even outreach customer expectations.
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Product
DUV-NIR Spectroscopic Reflectometry
FilmTek 2000
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Scientific Computing International
Automated metrology system designed for rapid, reliable, and accurate characterization of nearly any unpatterned thin film. Fully user-customizable wafer mapping capabilities rapidly generate 2D and 3D data maps of any measured parameter. Capable of simultaneous determination of multiple film characteristics within a fraction of a second per site.
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Product
Software
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LK Metrology offers the ultimate choice of CMM multi-sensor metrology softwares. The CAMIO software fits all solutions, especially those high-end industries, such as the aerospace industry, point cloud measurements and for offline solutions while the ARCOCAD software suits standard application, manual CMMs and portable measuring arms.
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Product
Potable Coordinate Measuring Machines
Romer
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A first in the world of portable measuring arms: The ROMER Absolute Arm features absolute encoders and is therefore the first measuring arm which does not require referencing before measurement. When the arm is turned on, it’s ready to go.Quality control, inspection, on-machine verification, reverse engineering, virtual assembly or 3D modelling. Wherever these needs arise, you will find the ROMER Absolute Arm. Much more than just a metrology tool, its value lies in its versatility.Portability, stability, light weight and high-performance laser scanners make the ROMER Absolute Arm an all-purpose 3D measurement, analysis and digitising tool that can be used by anyone, anywhere and with minimum training.Unlike many metrology devices, the ROMER Absolute Arm does not require warm-up time or initialization, thanks to a stable carbon fiber structure and industry leading Absolute encoders. Simply take the measuring arm to the part, switch it on and start measuring.
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Product
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
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The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.





























