Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
-
Product
Automated Metrology System
EVG®50
-
High-throughput, high-resolution metrology for bonded stacks and single wafers. The EVG 50 (fully automated stand-alone tool) and the Inline Metrology Module (integrated in EVG''s high-volume manufacturing systems) offer highly accurate measurements at high speed, utilizing different measurement methods for a large number of applications. The tool''s application range covers multi-layer thickness measurements for determination of the total thickness variation (TTV) of an intermediate layer, the inspection of bond interfaces as well as resist thickness measurement, and meets the most demanding requirements of the yield-driven semiconductor industry.
-
Product
330 System
NSX
-
With a combination of inspection plus metrology, NSX 330 System measures multiple applications including wafer-level metrology for micro bumps, RDL, kerf, overlay, and through silicon via (TSV) in a single wafer load.
-
Product
CAD Software
Verisurf CAD
-
Verisurf CAD is the foundation of all Verisurf suites and makes our software unique in the metrology industry. Verisurf software is different because it not only imports every major CAD file format; it is a complete 3D modeling application.Verisurf is the only metrology software that includes wireframe modeling, NURBS surfacing, Parasolid solid modeling, 2D drafting, and Model-Based Definition (MBD) that automates manufacturing.
-
Product
Thin Film Metrology Systems
Gemini Series
-
The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
-
Product
Calibration
-
Get the precision calibration tools you need to maintain the accuracy of your process, electrical, temperature, pressure, and flow measuring instruments and equipment. In addition, our in-house metrology lab will precalibrate an instrument at time of order or recalibrate equipment already owned. Our NIST-traceable calibration services and repairs help you meet your quality, regulatory, and compliance needs.
-
Product
Chip Manufacturing
-
KLA’s advanced process control and process enabling solutions support integrated circuit manufacturing. Using KLA’s comprehensive portfolio of defect inspection, review, metrology, patterning simulation, in situ process monitoring and data analytics systems, IC manufacturers can manage yield and reliability throughout the chip fabrication process - from research and development to final volume production. SPTS provides deposition process solutions for insulating materials and conducting metals that cover a range of chip manufacturing process steps. IC manufacturers use KLA's array of products and solutions to help accelerate their development and production ramp cycles, to achieve higher semiconductor die yield and improved IC quality, and to improve overall profitability in the IC manufacturing process.
-
Product
Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
-
The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
-
Product
PANELMAP
-
PANELMAP is a software package used to collect, edit, analyze and visualize measured physical parameters on rectangular semiconductor panels. PANELMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.
-
Product
Custom Systems
-
Metrology systems rapidly developed at the aperture, wavelength or configuration specified, without being limited to one manufacturer’s range of products, or the risk and expense of creating an inhouse expert team.
-
-
Product
Air Quality Monitoring System
-
A system that measures metrological parameters such as wind speed, wind direction, rainfall, radiation, temperature, barometric pressure and ambient parameters.
-
Product
3D Inspection Software
Metrolog X4
-
Metrolog X4 architecture is designed not only to benefit from current computer and OS technologies (Windows 64-bit, and multiprocessor PCs) that significantly increase the performances and throughput of your Metrology software, but is also aimed at simplifying your day-to-day measurement work. Metrolog X4 is a perfect Point Cloud software able to analyze large data size. High Performances in Point Cloud analysis: Large Data file import (CAD files, Point clouds, ...)
-
Product
Universal 3D Metrology Software Platform
PolyWorks
-
Defining the cutting edge of 3D metrology, the PolyWorks software suite maximizes productivity, quality, and profitability when integrating 3D measurement technologies into an industrial manufacturing process. From part and tool design and prototyping down to final inspection of assembled products, PolyWorks offers advanced solutions to cover the complete product development cycle. Interfacing directly with major brands and technologies of single-point and point cloud 3D measurement devices through plug-in extension modules, this universal platform also supports a wide array of native point cloud and polygonal model file formats.
-
Product
Electrodeless Z-Pinch™10 Watt EUV Source
EQ-10
-
The EQ-10 is a compact, easy-to-use, reliable, and cost-effective EUV light source, based on Energetiq's proven Electrodeless Z-pinch™ technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.
-
Product
Advanced Metrology System
NGS 3500L
-
This top performance system is designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. It is well suited for use as a dedicated production tool or as a versatile processdevelopment system. It features a powerful set of automated as well as semi-automatic optical/ video tools optimized for high accuracy, production throughput, and ease of use.
-
Product
Meter Engineering Board
MEB
-
Perform qualification, disconnect, communication, and advanced functional tests with TESCO’s new Meter Engineering Board. With basic metrology (0.1% accuracy) TESCO’s new MEB can also be used as a demand board or a time-run board, as part of meter certification, or to meet regulatory testing requirements. A new socket design provides automated operation to make loading easier. All new TESCO boards include our new electronically actuated sockets.
-
Product
PHOTO-2000μ Μ-LUX Meter
-
Hangzhou Everfine Photo-E-Info Co., LTD
The PHOTO-2000μ is designed for low illuminance testing above 10-6lx. Using the international leading low-lux detection technology, the measurement accuracy is high, good stability, often used in metering laboratory, physics laboratory, metrology laboratory and other related scientific research, engineering, product inspection and other occasions.
-
Product
Metrology System
IMPULSE V
-
With tighter wafer-to-wafer and within-wafer uniformity tolerances, integrated metrology systems are in use across various semiconductor processing steps. Based on demonstrated high-resolution optical technology, the IMPULSE V system provides higher sensitivity to thin film residue measurements during the CMP process. The IMPULSE platform boasts the industry’s most reliable hardware with best-in-class reliability and productivity metrics.
-
Product
High Precision Angular Positioning Calibration and Geometry Inspection
LabStandard
-
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.Designed for horizontal and vertical applications with self-locking worm gearing and a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
-
Product
Advanced Packaging & TSV
FilmTek 2000M TSV
-
Scientific Computing International
Advanced semiconductor packaging metrology system providing an unmatched combination of speed, accuracy, and precision for high-throughput measurements of resist thickness, through silicon vias (TSVs), Cu-pillars, bumps, redistribution layer (RDL) and other packaging processes.
-
Product
Fizeau Interferometers
-
Fizeau interferometers offer an unmatched combination of performance, quality and value in optical metrology. They produce accurate, repeatable interferometric measurements of surface shape, radius of curvature and transmitted wavefront quality.
-
Product
High Precision Angular Positioning, Calibration and Geometry Inspection
LabStandard DUO
-
Rotary Precision Instruments UK Ltd
Ultra precise rotary tables intended for fine inspection, metrology and test applications.2 axis design for rotary tilting applications with self-locking worm gearing and a high accuracy angular encoder ensures sensitivity and fine positioning for metrology and precision testing.
-
Product
Process XRR, XRF, and XRD metrology FAB tool
MFM310
-
Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
-
Product
Benchtop Metrology System
FilmTek 2000 SE
-
Scientific Computing International
Benchtop metrology system delivering unmatched measurement performance, versatility, and speed for unpatterned thin to thick film applications. Ideally suited for academic and R&D settings. Combines spectroscopic rotating compensator ellipsometry, multi-angle polarized spectroscopic reflection, and intuitive material modeling software to make even the most demanding of measurement tasks simple and reliable.
-
Product
Automated Surface Inspection for Glossy Components
-
Flawlessly glossy surfaces are among the most important quality features of many premium products. The smallest surface defects immediately have a degrading effect on the product. The result: disappointed end customers or buyers. At the same time, reflective surfaces are often very sensitive and a challenge for optical metrology. A manual inspection is tedious, expensive, and ultimately always governed by subjective decision criteria. During production, faulty painting or coating processes can cause high scrap rates. Defects that are not detected even during the final inspection can lead to expensive complaints and, in the worst case, to the loss of the customer. Only an efficient, automated surface inspection achieves the highest quality at acceptable costs.
-
Product
Precision LCR Meter
1693
-
The GenRad 1693 LCR Meter Bridge gives you the best combination of features, in an LCR meter, to meet your most demanding testing requirements. It's a versatile, flexible instrument with a full range of programmable test frequencies, speeds, and voltages. An easy to understand display show both primary and secondary measurement parameters. The Digibridge is an excellent choice for metrology applications requiring accurate and repeatable measurements. The 1693 is also widely used in production testing, incoming inspection, component design and evaluation, process monitoring or dielectric measurement applications.
-
Product
Measurement Systems
MicroMeasure3D
-
Sciences et Techniques Industrielles de la Lumière
STIL MicroMeasure3D, PORTICO3D and MAESTRO3D are measurement systems designed to achieve true 3D metrology of each point for the most demanding applications adapted to Industry 4.0 standards.
-
Product
Hi Rate Multi-Pixel Detection
-
Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions for such metrology systems and has designed and manufactured prototype detectors that can simultaneously detect 144 beams at 35MHz.
-
Product
2D/3D Wafer Metrology System
7980
-
Chroma 7980 provides accurate and reliable profile information. 7980 adopts new BLiS technology and specially designed platform to achieve 2D/3D nanoscale measurement.
-
Product
microRSP
M200
-
The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
