Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Metrology Systems
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VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
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Reticle Manufacturing
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An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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3MS Automatic Measuring System
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With the accelerating of modern meteorology, various ground automatic weather stations have been widely applied. As a result, the need for metrological verification is soaring. However, the existing metrological verification standards, equipment and methods are barely enough to meet the current growing requirements. So systemizing metrological verification management and automating the detection will be the vital factor to solve the problem.
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Industrial Lenses
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ZEISS lenses for technical applications are key components in complex production processes (Machine Vision) as well as in optical metrology, medical applications, traffic enforcement, quality assurance, sports and many other applications. Here they prove their outstanding image performance and reliability. Due to the precise manual adjustment of the helical focusing mount our partners will gain much better results than with comparable lenses.
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Gauges & Calibrators
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Ralston Instruments' gauges and calibrators are born from decades of experience working with technicians, project managers and facilities teams responsible for maintaining metrology instruments.
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Metrology
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Optical critical dimension (OCD) metrology and film metrology require accuracy and repeatability. Onto Innovation's techniques are well-established and trusted by semiconductor manufacturers around the globe.
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EFEM Platform
Equipment Front End Module (EFEM) Platform
Our EFEM Platform can act as a standard EFEM, or can be customized to suit your application’s cleanliness, handling technique, throughput, and form-factor requirements. From design to manufacturing, we offer units in varying complexity and precision and can integrate the needed hardware, software, vision, optics design, sub-micron metrology, environmental control and materials handling to fit your needs from single units to 4-wide.
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Smart Factory Inspection System
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API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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Express Analyzer
MAYA Express
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Lyncis Express Analyzer was developed to answer the need for fast and reliable material chemical composition analysis. The application is valued by the clients where modern agile manufacturing metrology being applied and quick assessment of material is necessary to adjust critical process parameters without waiting on the lab results.
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Inspection & Metrology Platform
Neon
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Neon is Cohu’s next generation inspection platform optimized for small, fragile semiconductors used in automotive, consumer, industrial and medical, and mobility applications.
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Metrology Training Services
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As a leading provider of precision measurement equipment we are experts at training new equipment customer on how to get the best out of the equipment and training in the accompanying software functionality. Training can take place at an API facility or your location. Customers will required to pass a competency test and will subsequently receive a certificate of training completion.
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Optical Filter Sets
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Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Length Gauges
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HEIDENHAIN length gauges deliver high accuracy, even over large measuring ranges. They are commonly used wherever fast, reliable, and accurate measurements are required, such as in production metrology, multi-gauging fixtures, measuring equipment monitoring, and position measurement.
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Packaging Manufacturing
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KLA’s extensive portfolio of packaging solutions accelerates the manufacturing process for outsourced semiconductor assembly and test (OSAT) providers, device manufacturers and foundries for a wide range of packaging applications. Innovations in advanced packaging, such as 2.5D/3D IC integration using through silicon vias (TSVs), wafer-level chip scale packaging (WLCSP), fan-out wafer-level packaging (FOWLP) and heterogeneous integration as well as a wide range of IC substrates create new and evolving process requirements. KLA offers systems for packaging inspection, metrology, die sorting and data analytics focused on meeting quality standards and increasing yield before and after singulation. SPTS provides a broad range of etch and deposition process solutions for advanced packaging applications. Orbotech offers a portfolio of technologies that includes automated optical inspection (AOI), automated optical shaping (AOS), direct imaging (DI), UV laser drilling, inkjet/additive printing and software solutions to ensure manufacture of the highest quality of IC substrates.
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Bottle Cap Torque Meter
HN-B
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Shenzhen Chuangxin Instruments Co., Ltd.
HN-B Series Cap Torque Meter is an intelligent metrologic instrument and is designed for detecting and calibrating the torsion of various caps. Installation of clamps is easy, rapid and its max diameter can reach 200mm.You can connect it to PC by USD output and transmit data for analysis and printing.
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Software Development Kit
Verisurf SDK
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Available free with all version after Verisurf 2017 – the Verisurf Software Development Kit (or “SDK”) provides a flexible programming environment specifically designed for creating customized dimensional metrology applications that enable manufacturing automation.
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Mask Bacterial Filtration Efficiency (BFE) Tester
WKS-1010
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WKS-1010 Mask Bacterial Filtration Efficiency (BFE) Tester is used to test the percentage of the mask material to filter out the suspended particles containing bacteria under the specified flow rate. It is suitable for the performance test of the bacterial filtration efficiency of medical surgical masks by metrological inspection departments, scientific research institutes, medical mask manufacturers and other related departments.
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Advanced Metrology System
AMS Series
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Precision systems for accurate measurement and quality control in semiconductor manufacturing.
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Automated Semiconductor Wafer Optical Inspection and Metrology
SITEview Software
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Microtronic SITEview Software is designed from the end-user operator’s perspective and is easy to use, fully featured, and modular. Applications include visual wafer inspection, OCR sorting, wafer defect review, second optical inspection, image storage and retrieval, laser marking, microscope interface, and GEM/SECS II communication and seamlessly integrates with EAGLEview, MicroINSPECT and MicroSORT.
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Gear Metrology System
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The Gear Metrology System is a non-contact gear inspection system that generates a 3D point cloud, providing manufacturers with real-time metrology and inspection data to optimize production processes, and improve ROI.
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Semiconductor Solutions
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Bruker's suite of technologies for semiconductor manufacturing address critical metrology and process needs across the broadest range of applications from R&D to process improvement. 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation products.
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Adapter, 2.4 mm (f) to 3.5 mm (m), DC to 26.5 GHz
11901D
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The Keysight 11901D is a metrology grade, 2.4 mm female to 3.5 mm male adapter with dc to 26.5 GHz operation.
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Optical Gaging Products
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Quality Vision International Inc.
OGP® pioneered multisensor measurement with vision, touch probe and laser sensors. For over 75 years, OGP has consistently led with a succession of innovative systems and sensors to tackle the most difficult measurement challenges, especially as it pertains to the medical industry. Multisensor metrology is a preferred quality control technology for manufacturers to develop, maintain, and improve the quality of medical devices.
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Dimensional Metrology System
SUMMIT
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The VIEW Summit systems are designed for components requiring a large work envelope and high accuracy. Based on the same core technologies of optics, high speed linear motors, and high resolution scales used in the VIEW Pinnacle, the Summit features a fixed bridge design. Separate X and Y axis motion systems ensure that neither influences the mechanical integrity of the other, while also enabling easy loading and unloading of large parts.
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Surface Analysis
Dimension AFP
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The Dimension AFP is the world's only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler tomonitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability.
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SF6 Decomposition Products Detector
JH4000A-4
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Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000A-4 SF6 Electrical Equipment Decomposition Products Detector is a high precision, intelligent and portable device, able to make judgment rapidly and correctly based on the content of main decomposition products of insulation materials inside the SF6 electrical equipment like SF6 circuit breaker, instrument transformer, GIS and transformer. It detects SO2+SOF2, H2S, CO and HF. It is reliable, accurate and stable. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. Decomposition products detection provides reliable evidence for the internal fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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Failure Analysis And Magnetic Imaging Services
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Micro Magnetics offers failure analysis services on a contractual basis. We maintain two current density metrology systems at our headquarters in Fall River and can produce maps of current flow in a wide variety of ICs and packages, usually with initial results delivered within 48 hours. Our engineers will work closely with you to understand and interpret the results in order to determine the root cause of the failure.
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Adapters and Connectors
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A broad range of adapters and connectors designed for long life, exceptional repeatability, and legendary reliability. Metrology grade, instrument grade, and general purpose grade adapters are available in frequencies up to 110GHz.
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Reference Meter
SB1300
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Shenzhen Star Instrument Co., Ltd.
The SB1300 three-phase multi-function reference meter incorporates 32-bit floating point DSP, wide-range measuring and embedding industrial PC technologies. This model was the first approved by China National Institute of Metrology. Star Instrument has been granted the first manufacturing license for class 0.02 reference meters. Basic measuring range (phase voltage): 1V~480V, current measuring range: 1mA~120A; wide measuring range (phase voltage): 0.1V~1000V, current measuring range: 0.1mA~200A
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Post Dicing
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Camtek offers dedicated inspection and metrology solutions for dicing-related processes, ensuring the reliability of the end product. Camtek developed new capabilities to address new dicing technologies such as Stealth and Plasma dicing using new algorithmic and technologies such as Back Light illumination, as well as various handling solutions.
